Projekt

Exploring Organic Ice Resist Lithography

Udbyder

Vejleder

Sted

København og omegn

If you are interested in nanofabrication and microscopy, come join us!

Organic Ice Resist Lithography (OIRL) is a new approach to electron beam based nanofabrication, developed at DTU Danchip/Cen. The goal of electron beam lithography process is to create a desired pattern in a material called resist. In OIRL, the resist is made from vapors of organic materials such as alcohols, hydrocarbons, sugars, etc., which are condensed into ice when they are sprayed on a substrate held at cryogenic temperature (Figure a). The organic ices are then exposed to the scanning electron beam (Figure b), which polymerizes/crosslinks the exposed areas until they become non-volatile at room temperature. After exposure, the substrate is heated up (Figure 1), and the unexposed ice sublimates away.

We believe that OIRL has a bright future for applications involving fabrication of complex 3D functional materials and bio-devices. One particular application we are currently working on is the fabrication of carbon 3D electrodes for electrochemical studies of cell behavior. The aim of this project is to fabricate carbonaceous structures with OIRL and measure their electrical conductivity. We will test how conductivity depends on the choice of organic ice material, e-beam exposure conditions and fabricated structure topology.

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Kontakt

Virksomhed/organisation

DTU Nanolab

Navn

Anna Elsukova

Stilling

Postdoc

Mail

annaels@dtu.dk

Vejleder-info

Bachelor i Fysik og Nanoteknologi

Vejleder

Anna Elsukova

ECTS-point

15 - 35

Type

Bachelorprojekt, Kandidatspeciale

Kandidatuddannelsen i Fysik og Nanoteknologi

Vejleder

Anna Elsukova

ECTS-point

15 - 35

Type

Bachelorprojekt, Kandidatspeciale

OM DTU

DTU er et teknisk eliteuniversitet med international rækkevidde og standard. Vores mission er at udvikle og nyttiggøre naturvidenskab og teknisk videnskab til gavn for samfundet. 10.000 studerende uddanner sig her til fremtiden, og 5.700 medarbejdere har hver dag fokus på uddannelse, forskning, myndighedsrådgivning og innovation, som bidrager til øget vækst og velfærd.

Find os her

Anker Engelunds Vej 1
Bygning 101A
2800 Kgs. Lyngby


45 25 25 25

dtu@dtu.dk

CVR-nr. 30 06 09 46

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