Project

Exploring Organic Ice Resist Lithography

Publisher

Supervisor

Location

Greater Copenhagen area

If you are interested in nanofabrication and microscopy, come join us!

Organic Ice Resist Lithography (OIRL) is a new approach to electron beam based nanofabrication, developed at DTU Danchip/Cen. The goal of electron beam lithography process is to create a desired pattern in a material called resist. In OIRL, the resist is made from vapors of organic materials such as alcohols, hydrocarbons, sugars, etc., which are condensed into ice when they are sprayed on a substrate held at cryogenic temperature (Figure a). The organic ices are then exposed to the scanning electron beam (Figure b), which polymerizes/crosslinks the exposed areas until they become non-volatile at room temperature. After exposure, the substrate is heated up (Figure 1), and the unexposed ice sublimates away.

We believe that OIRL has a bright future for applications involving fabrication of complex 3D functional materials and bio-devices. One particular application we are currently working on is the fabrication of carbon 3D electrodes for electrochemical studies of cell behavior. The aim of this project is to fabricate carbonaceous structures with OIRL and measure their electrical conductivity. We will test how conductivity depends on the choice of organic ice material, e-beam exposure conditions and fabricated structure topology.

Download Materials

Search in postings
Contact

Company / Organization

DTU Nanolab

Name

Anna Elsukova

Position

Postdoc

Mail

annaels@dtu.dk

Supervisor info

BSc in Physics and Nanotechnology

Supervisor

Anna Elsukova

ECTS credits

15 - 35

Type

BSc project, MSc thesis

MSc in Physics and Nanotechnology

Supervisor

Anna Elsukova

ECTS credits

15 - 35

Type

BSc project, MSc thesis

Technical University of Denmark

For almost two centuries DTU, Technical University of Denmark, has been dedicated to fulfilling the vision of H.C. Ørsted – the father of electromagnetism – who founded the university in 1829 to develop and create value using the natural sciences and the technical sciences to benefit society.


Today, DTU is ranked as one of the foremost technical universities in Europe, continues to set new records in the number of publications, and persistently increases and develops our partnerships with industry, and assignments accomplished by DTU’s public sector consultancy.

Find us here

Anker Engelunds Vej 1
Bygning 101A
2800 Kgs. Lyngby

Denmark



Tlf. (+45) 45 25 25 25

CVR-nr. 30 06 09 46

All vacant positions
 

loading..